SPM3LR
The SPM3LR stage is a 3-axis nanopositioner, offering a travel range of 100µm, 200µm or 300µm along X and Y.
The Z portion of the SPM3LR stage can have up to 50µm travel range and offers the highest speed capabilities available on the market with a maximum resonnant frenquency of 12.5kHz. the SPM3LR.xxx.05’s step response time on the Z axis can be smaller than a millisecond.
The SPM3LR stage is therefore particularly well suited for demanding metrology applications such as Atomic Force Microscopy.
This piezostage can be proposed with a coarse positioning Microstage (See our Hybrid System).
![]() |
|
XY Specifications | ||||
---|---|---|---|---|
SPM3LR.100.xx | SPM3LR.200.xx | SPM3LR.300.xx | Unit | |
Range of motion X Y | 100 | 200 | 300 | µm |
Resolution X Y | 0.1 | 0.2 | 0.3 | nm |
Typical noise floor X Y | 0.01 | 0.02 | 0.03 | nm |
Full range repeatability X Y | 0.2 | 0.4 | 0.6 | nm |
Linearization X Y (typical) | 0.02% | |||
Resonant frequency X / Y | 500 / 300 | 350 / 200 | 250 / 150 | Hz |
Stiffness X / Y | 0.6 / 0.35 | 0.5 / 0.3 | 0.4 / 0.25 | N/µm |
Size W x L x H | 121 x 121 x (depends on Z axis range of motion) | mm |
Z Specifications | |||||
---|---|---|---|---|---|
SPM3LR.xxx.05 | SPM3LR.xxx.10 | SPM3LR.xxx.25 | SPM3LR.xxx.50 | Unit | |
Range of motion Z | 5 | 10 | 30 | 50 | µm |
Resolution Z | 0.005 | 0.01 | 0.03 | 0.05 | nm |
Typical noise floor Z | 0.0005 | 0.001 | 0.003 | 0.005 | nm |
Full range repeatability Z | 0.01 | 0.02 | 0.06 | 0.1 | nm |
Linearization Z (typical) | 0.02% | ||||
Resonant frequency Z | 12 500 | 5 500 | 5 500 | 3 500 | Hz |
Stiffness Z | 40 | 7.5 | 7.5 | 2.7 | N/µm |
Size W x L x H | 121 x 121 x 33.8 | 121 x 121 x 33.8 | 121 x 121 x 48.8 | 121 x 121 x 66.8 | mm |
General Specifications | ||
---|---|---|
SPM3LR.xxx.xx | Unit | |
Maximum load* : | ||
- horizontal use | 0.1 | kg |
- vertical use (max torque) | 0.01 | N.m |
Sensor | Silicon HR sensor | |
Material | Al | |
Cable length** | 2 | m |
Controller | High Speed |
SPM-3LR.xxx.xx :
xxx : 100, 200 or 300 according to range of motion of X Y axis
xx : 05, 10, 25 or 50 according to range of motion of Z axis
*Higher load on request
**Higher length on request