SPM3LR

The SPM3LR stage is a 3-axis nanopositioner, offering a travel range of 100µm, 200µm or 300µm along X and Y.

The Z portion of the SPM3LR stage can have up to 50µm travel range and offers the highest speed capabilities available on the market with a maximum resonnant frenquency of 12.5kHz. the SPM3LR.xxx.05’s step response time on the Z axis can be smaller than a millisecond.

The SPM3LR stage is therefore particularly well suited for demanding metrology applications such as Atomic Force Microscopy.

This piezostage can be proposed with a coarse positioning Microstage (See our Hybrid System).

————————————————————————————————————

LFHS-2 with Z-STAGE.10

  • Features :

    • Ultra high speed Z axis
    • All 3 axis are Direct drive
    • 100, 200, 300 µm XY travel range
    • 5, 10, 25, 50 µm Z travel range
    • Closed loop control
    • Silicon sensor technology
    • Picometric noise floor

    Applications :

    • Atomic Force Microscopy
    • Scanning Probe Microscopy
    • High speed and high resolution XYZ positioning
  • 3 axis Controller PRIO3 Axis Controller
    Our 3 axis PiezoStage will be used with a 3 axis controller standard or high speed
    MANUAL-STAGE+SPM-3Hybrid system
    The SPM3LR can be proposed with a coarse positioning stage
    Adaptation plate for 160x110 apertureAdapter Plate
    This adapter plate allows to mount the SPM3LR on a stages with K-type frame (160mm x 110mm aperture)
  • downloadTechnical Drawing
    SPM3LR Piezostage dimensions
    Download
    PDF -
    259 Ko

————————————————————————————————————
Specifications :

 XY Specifications 
SPM3LR.100.xxSPM3LR.200.xxSPM3LR.300.xxUnit
Range of motion X Y100200300µm
Resolution X Y0,10,20,3nm
Typical noise floor X Y0,010,020,03nm
Full range repeatability X Y0,20,40,6nm
Linearization X Y (typical)0,02%0,02%0,02%
Resonant frequency X / Y500 / 300350 / 200250 / 150Hz
Stiffness X / Y0,6 / 0,350,5 / 0,30,4 / 0,25N/µm
Size W x L x H121 x 121 x (depend of Z axis range of motion)mm

 Z Specifications 
SPM3LR.xxx.05SPM3LR.xxx.10SPM3LR.xxx.25SPM3LR.xxx.50Unit
Range of motion Z5102550µm
Resolution Z0,0050,010,0250,05nm
Typical noise floor Z0,00050,0010,00250,005nm
Full range repeatability Z0,010,020,050,1nm
Linearization Z (typical)0,02%0,02%0,02%0,02%
Resonant frequency Z12 5005 5005 5003 500Hz
Stiffness Z407,57,52,7N/µm
Size W x L x H121 x 121 x 33,7121 x 121 x 33,7121 x 121 x 49,7121 x 121 x 69,7mm

 General Specifications 
SPM3LR.xxx.xxUnit
Maximum load* :
- horizontal use0,1kg
- vertical use (max torque)0,01N.m
SensorSilicon HR sensor
MaterialAl
Cable length**2m
ControllerHigh Speed

SPM-3LR.xxx.xx :
xxx : 100, 200 or 300 according to range of motion of X Y axis
xx : 05, 10, 25 or 50 according to range of motion of Z axis

*Higher load on request
**Higher length on request


EUROPE : 9:00 am - 6:30 pm
USA : 7:00 am - 4:00 pm (CST)

Advices & after-sales service

Demo product on request