The SPM3LR stage is a 3-axis nanopositioner, offering a travel range of 100µm, 200µm or 300µm along X and Y.

The Z portion of the SPM3LR stage can have up to 50µm travel range and offers the highest speed capabilities available on the market since it can have up to 12.5kHz resonnant frequency. The  step response time of the Z axis of the SPM3LR.xxx.05 can be smaller than a millisecond.

Hence, the SPM3LR stage is designed for demanding metrology applications such as Atomic Force Microscopy.

This piezostage can be proposed with a coarse positioning Microstage (See our Hybrid System).


LFHS-2 with Z-STAGE.10

  • Features :

    • Ultra high speed Z axis
    • All 3 axis are Direct drive
    • 100, 200, 300 µm XY travel range
    • 5, 10, 25, 50 µm Z travel range
    • Closed loop control
    • Silicon sensor technology
    • Picometric noise floor

    Applications :

    • Atomic Force Microscopy
    • Scanning Probe Microscopy
    • High speed and high resolution XYZ positioning
  • 3 axis Controller PRIO3 Axis Controller
    Our 3 axis PiezoStage will be used with a 3 axis controller standard or high speed
    MANUAL-STAGE+SPM-3Hybrid system
    The SPM3LR can be proposed with a coarse positioning stage
    Adaptation plate for 160x110 apertureAdapter Plate
    This adapter plate allows to mount the SPM3LR on a stages with K-type frame (160mm x 110mm aperture)
  • downloadTechnical Drawing
    SPM3LR Piezostage dimensions
    PDF -
    259 Ko

Specifications :

 XY Specifications 
Range of motion X Y100200300µm
Resolution X Y0,10,20,3nm
Typical noise floor X Y0,010,020,03nm
Full range repeatability X Y0,20,40,6nm
Linearization X Y (typical)0,02%0,02%0,02%
Resonant frequency X / Y500 / 300350 / 200250 / 150Hz
Stiffness X / Y0,6 / 0,350,5 / 0,30,4 / 0,25N/µm
Size W x L x H121 x 121 x (depend of Z axis range of motion)mm

 Z Specifications 
Range of motion Z5102550µm
Resolution Z0,0050,010,0250,05nm
Typical noise floor Z0,00050,0010,00250,005nm
Full range repeatability Z0,010,020,050,1nm
Linearization Z (typical)0,02%0,02%0,02%0,02%
Resonant frequency Z12 5005 5005 5003 500Hz
Stiffness Z407,57,52,7N/µm
Size W x L x H121 x 121 x 33,7121 x 121 x 33,7121 x 121 x 49,7121 x 121 x 69,7mm

 General Specifications 
Maximum load* :
- horizontal use0,1kg
- vertical use (max torque)0,01N.m
SensorSilicon HR sensor
Cable length**2m
ControllerHigh Speed

SPM-3LR.xxx.xx :
xxx : 100, 200 or 300 according to range of motion of X Y axis
xx : 05, 10, 25 or 50 according to range of motion of Z axis

*Higher load on request
**Higher length on request

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USA : 7:00 am - 4:00 pm (CST)

Advices & after-sales service

Demo product on request