SPM3LR

The SPM3LR stage is a 3-axis nanopositioner, offering a travel range of 100µm, 200µm or 300µm along X and Y.

The Z portion of the SPM3LR stage can have up to 50µm travel range and offers the highest speed capabilities available on the market since it can have up to 12.5kHz resonnant frequency. The step response time of the Z axis of the SPM3LR.xxx.05 can be smaller than a millisecond.

Hence, the SPM3LR stage is designed for demanding metrology applications such as Atomic Force Microscopy.

This piezostage can be proposed with a coarse positioning Microstage (See our Hybrid System).

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Features & Applications
Related Product
Downloads

Features :
- Ultra high speed Z axis
- All 3 axis are Direct drive
- 100, 200, 300 µm XY travel range
- 5, 10, 25, 50 µm Z travel range
- Closed loop control
- Silicon sensor technology
- Picometric noise floor
Applications :
- Atomic Force Microscopy
- Scanning Probe Microscopy
- High speed and high resolution XYZ positioning

	3 Axis Controller Our 3 axis PiezoStage will be used with a 3 axis controller standard or high speed
	Hybrid system The SPM3LR can be proposed with a coarse positioning stage
	Adapter Plate This adapter plate allows to mount the SPM3LR on a stages with K-type frame (160mm x 110mm aperture)

Technical Drawing
SPM3LR Piezostage dimensions Download
PDF -
259 Ko

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Specifications :

	XY Specifications
	SPM3LR.100.xx	SPM3LR.200.xx	SPM3LR.300.xx	Unit
Range of motion X Y	100	200	300	µm
Resolution X Y	0,1	0,2	0,3	nm
Typical noise floor X Y	0,01	0,02	0,03	nm
Full range repeatability X Y	0,2	0,4	0,6	nm
Linearization X Y (typical)	0,02%	0,02%	0,02%
Resonant frequency X / Y	500 / 300	350 / 200	250 / 150	Hz
Stiffness X / Y	0,6 / 0,35	0,5 / 0,3	0,4 / 0,25	N/µm
Size W x L x H		121 x 121 x (depend of Z axis range of motion)		mm

	Z Specifications
	SPM3LR.xxx.05	SPM3LR.xxx.10	SPM3LR.xxx.25	SPM3LR.xxx.50	Unit
Range of motion Z	5	10	25	50	µm
Resolution Z	0,005	0,01	0,025	0,05	nm
Typical noise floor Z	0,0005	0,001	0,0025	0,005	nm
Full range repeatability Z	0,01	0,02	0,05	0,1	nm
Linearization Z (typical)	0,02%	0,02%	0,02%	0,02%
Resonant frequency Z	12 500	5 500	5 500	3 500	Hz
Stiffness Z	40	7,5	7,5	2,7	N/µm
Size W x L x H	121 x 121 x 33,7	121 x 121 x 33,7	121 x 121 x 49,7	121 x 121 x 69,7	mm

	General Specifications

	SPM3LR.xxx.xx	Unit
Maximum load* :
- horizontal use	0,1	kg
- vertical use (max torque)	0,01	N.m
Sensor	Silicon HR sensor
Material	Al
Cable length**	2	m
Controller	High Speed

SPM-3LR.xxx.xx :
xxx : 100, 200 or 300 according to range of motion of X Y axis
xx : 05, 10, 25 or 50 according to range of motion of Z axis

*Higher load on request
**Higher length on request