SPM3LR

The SPM3LR stage is a 3-axis nanopositioner, offering a travel range of 100µm, 200µm or 300µm along X and Y.

The Z portion of the SPM3LR stage can have up to 50µm travel range and offers the highest speed capabilities available on the market with a maximum resonnant frenquency of 12.5kHz. the SPM3LR.xxx.05’s step response time on the Z axis can be smaller than a millisecond.

The SPM3LR stage is therefore particularly well suited for demanding metrology applications such as Atomic Force Microscopy.

This piezostage can be proposed with a coarse positioning Microstage (See our Hybrid System).

Features & Applications
Related Product
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Features :
- Ultra high speed Z axis
- All 3 axis are Direct drive
- 100, 200, 300 µm XY travel range
- 5, 10, 25, 50 µm Z travel range
- Closed loop control
- Silicon sensor technology
- Picometric noise floor
Applications :
- Atomic Force Microscopy
- Scanning Probe Microscopy
- High speed and high resolution XYZ positioning

	3 Axis Controller Our 3 axis PiezoStage will be used with a 3 axis controller standard or high speed
	Hybrid system The SPM3LR can be proposed with a coarse positioning stage
	Adapter Plate This adapter plate allows to mount the SPM3LR on a stages with K-type frame (160mm x 110mm aperture)

Technical Drawing
SPM3LR Piezostage dimensions Download
PDF -
72 Ko

	XY Specifications
	SPM3LR.100.xx	SPM3LR.200.xx	SPM3LR.300.xx	Unit
Range of motion X Y	100	200	300	µm
Resolution X Y	0.1	0.2	0.3	nm
Typical noise floor X Y	0.01	0.02	0.03	nm
Full range repeatability X Y	0.2	0.4	0.6	nm
Linearization X Y (typical)	0.02%	0.02%	0.02%
Resonant frequency X / Y	500 / 300	350 / 200	250 / 150	Hz
Stiffness X / Y	0.6 / 0.35	0.5 / 0.3	0.4 / 0.25	N/µm
Size W x L x H		121 x 121 x (depends on Z axis range of motion)		mm

	Z Specifications
	SPM3LR.xxx.05	SPM3LR.xxx.10	SPM3LR.xxx.25	SPM3LR.xxx.50	Unit
Range of motion Z	5	10	30	50	µm
Resolution Z	0.005	0.01	0.03	0.05	nm
Typical noise floor Z	0.0005	0.001	0.003	0.005	nm
Full range repeatability Z	0.01	0.02	0.06	0.1	nm
Linearization Z (typical)	0.02%	0.02%	0.02%	0.02%
Resonant frequency Z	12 500	5 500	5 500	3 500	Hz
Stiffness Z	40	7.5	7.5	2.7	N/µm
Size W x L x H	121 x 121 x 33.8	121 x 121 x 33.8	121 x 121 x 48.8	121 x 121 x 66.8	mm

	General Specifications

	SPM3LR.xxx.xx	Unit
Maximum load* :
- horizontal use	0,1	kg
- vertical use (max torque)	0,01	N.m
Sensor	Silicon HR sensor
Material	Al
Cable length**	2	m
Controller	High Speed

SPM-3LR.xxx.xx :
xxx : 100, 200 or 300 according to range of motion of X Y axis
xx : 05, 10, 25 or 50 according to range of motion of Z axis

*Higher load on request
**Higher length on request