The SPM3LR stage is a 3-axis nanopositioner, offering a travel range of 100µm, 200µm or 300µm along X and Y.

The Z portion of the SPM3LR stage can have up to 50µm travel range and offers the highest speed capabilities available on the market with a maximum resonnant frenquency of 12.5kHz. the SPM3LR.xxx.05’s step response time on the Z axis can be smaller than a millisecond.

The SPM3LR stage is therefore particularly well suited for demanding metrology applications such as Atomic Force Microscopy.

This piezostage can be proposed with a coarse positioning Microstage (See our Hybrid System).

LFHS-2 with Z-STAGE.10

  • Features :

    • Ultra high speed Z axis
    • All 3 axis are Direct drive
    • 100, 200, 300 µm XY travel range
    • 5, 10, 25, 50 µm Z travel range
    • Closed loop control
    • Silicon sensor technology
    • Picometric noise floor

    Applications :

    • Atomic Force Microscopy
    • Scanning Probe Microscopy
    • High speed and high resolution XYZ positioning
  • 3 axis Controller PRIO3 Axis Controller
    Our 3 axis PiezoStage will be used with a 3 axis controller standard or high speed
    MANUAL-STAGE+SPM-3Hybrid system
    The SPM3LR can be proposed with a coarse positioning stage
    Adaptation plate for 160x110 apertureAdapter Plate
    This adapter plate allows to mount the SPM3LR on a stages with K-type frame (160mm x 110mm aperture)
  • downloadTechnical Drawing
    SPM3LR Piezostage dimensions
    PDF -
    72 Ko

 XY Specifications 
Range of motion X Y100200300µm
Resolution X Y0.10.20.3nm
Typical noise floor X Y0.010.020.03nm
Full range repeatability X Y0.20.40.6nm
Linearization X Y (typical)0.02%
Resonant frequency X / Y500 / 300350 / 200250 / 150Hz
Stiffness X / Y0.6 / 0.350.5 / 0.30.4 / 0.25N/µm
Size W x L x H121 x 121 x (depends on Z axis range of motion)mm

 Z Specifications 
Range of motion Z5103050µm
Resolution Z0.0050.010.030.05nm
Typical noise floor Z0.00050.0010.0030.005nm
Full range repeatability Z0.
Linearization Z (typical)0.02%
Resonant frequency Z12 5005 5005 5003 500Hz
Stiffness Z407.57.52.7N/µm
Size W x L x H121 x 121 x 33.8121 x 121 x 33.8121 x 121 x 48.8121 x 121 x 66.8mm

 General Specifications 
Maximum load* :
- horizontal use0.1kg
- vertical use (max torque)0.01N.m
SensorSilicon HR sensor
Cable length**2m
ControllerHigh Speed

SPM-3LR.xxx.xx :
xxx : 100, 200 or 300 according to range of motion of X Y axis
xx : 05, 10, 25 or 50 according to range of motion of Z axis

*Higher load on request
**Higher length on request

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USA : 7:00 am - 4:00 pm (CST)

Advices & after-sales service

Demo product on request