The SPM3 stage is a 3-axis ultra-high speed nanopositioner, offering a travel range up to 75µm along X and Y with resonant frequencies higher than 2kHz on both axis.
The Z portion of the SPM3 stage can have up to 50µm travel range and offers the highest speed capabilities available on the market with a maximum of 12.5kHz resonnant frequencies. Indeed, when used with the high power controller, SPM3.5’s step response time on the Z axis can be smaller than a millisecond.
This is way the SPM stage is particularly well suited for demanding metrology applications such as Atomic Force Microscopy.
It can be combined with a coarse positioning Microstage (See our Hybrid System).
|Range of motion X Y||30||50||75||µm|
|Resolution X Y||0.03||0.05||0.075||nm|
|Typical noise floor X Y||0.003||0.006||0.0075||nm|
|Full range repeatability X Y||0.06||0.1||0.15||nm|
|Linearization X Y (typical)||0.02%||0.02%||0.02%|
|Resonant frequency X / Y||3000 / 2000||Hz|
|Stiffness X / Y||4 / 3||N/µm|
|Size W x L x H||121 x 121 x (depends on Z axis range of motion)||mm|
|Range of motion Z||5||10||30||50||µm|
|Typical noise floor Z||0.0005||0.001||0.003||0.005||nm|
|Full range repeatability Z||0.01||0.02||0.06||0.1||nm|
|Linearization Z (typical)||0.02%||0.02%||0.02%||0.02%|
|Resonant frequency Z||12 500||5 500||5 500||3 500||Hz|
|Size W x L x H||121 x 121 x 33.8||121 x 121 x 33.8||121 x 121 x 48.8||121 x 121 x 66.8||mm|
|Maximum load* :|
|- horizontal use||0,1||kg|
|- vertical use (max torque)||0,01||N.m|
|Sensor||Silicon HR sensor|
XX : 30, 50 or 75 according to range of motion of X Y axis
xx : 5, 10, 25 or 50 according to range of motion of Z axis
*Higher load on request
**Higher length on request
Exemple of use :
|Hybrid system with SPM3.50||Customized system with SPM3.50|