The SPM3 stage is a 3-axis ultra-high speed nanopositioner, offering a travel range of up to 75µm along X and Y with resonant frequencies higher than 2kHz on both axis.

The Z portion of the SPM3 stage can have up to 50µm travel range and offers the highest speed capabilities available on the market since it can have up to 12.5kHz resonnant frequency. Indeed, when used with the high power controller, the  step response time of the Z axis of the SPM3.5 can be smaller than a millisecond.

Hence, the SPM stage is designed for demanding metrology applications such as Atomic Force Microscopy.

This piezostage can be proposed with a coarse positioning Microstage (See our Hybrid System).

This nanopositioner is part of our high-speed product line (High power controller available).


LFHS-2 with Z-STAGE.10

  • Features :

    • Ultra high speed
    • All 3 axis are Direct drive
    • 75 µm XY and up to 50µm Z travel range
    • Closed loop control
    • Silicon sensor technology
    • Picometric noise floor

    Applications :

    • Atomic Force Microscopy
    • Scanning Probe Microscopy
    • High speed and high resolution XYZ positioning
  • 3 axis Controller PRIO3 Axis Controller
    Our 3 axis PiezoStage will be used with a 3 axis controller standard or high speed
    MANUAL-STAGE+SPM-3Hybrid system
    The SPM3 can be proposed with a coarse positioning stage
    Adaptation plate for 160x110 apertureAdapter Plate
    This adapter plate allows to mount the SPM3 on a stages with K-type frame (160mm x 110mm aperture)
  • downloadTechnical Drawing
    SPM3 Piezostage dimensions
    PDF -
    23,8 Ko
    downloadPiezoConcept Datasheet
    Complet datasheet with variable travel range, specifications, dimensions ...
    PDF -
    1 766 Ko

Specifications :

 XY Specifications 
Range of motion X Y305075µm
Resolution X Y0,030,050,075nm
Typical noise floor X Y0,0030,0060,0075nm
Full range repeatability X Y0,060,10,15nm
Linearization X Y (typical)0,02%0,02%0,02%
Resonant frequency X / Y3000 / 2000Hz
Stiffness X / Y4 / 3N/µm
Size W x L x H121 x 121 x (depend of Z axis range of motion)mm
 Z Specifications 
Range of motion Z5102550µm
Resolution Z0,0050,010,0250,05nm
Typical noise floor Z0,00050,0010,00250,005nm
Full range repeatability Z0,010,020,050,1nm
Linearization Z (typical)0,02%0,02%0,02%0,02%
Resonant frequency Z12 5005 5005 5003 500Hz
Stiffness Z407,57,52,7N/µm
Size W x L x H121 x 121 x 33,7121 x 121 x 33,7121 x 121 x 49,7121 x 121 x 69,7mm
 General Specifications 
Maximum load* :
- horizontal use0,1kg
- vertical use (max torque)0,01N.m
SensorSilicon HR sensor
Cable length**2m
ControllerHigh Speed

SPM3.XX.xx :
XX : 30, 50 or 75 according to range of motion of X Y axis
xx : 5, 10, 25 or 50 according to range of motion of Z axis

*Higher load on request
**Higher length on request


Exemple of use :

LFHS-2 with Z-STAGE.50 on a Manual Stage
Hybrid system with SPM3.50 Customized system with SPM3.50

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USA : 7:00 am - 4:00 pm (CST)

Advices & after-sales service

Demo product on request