SPM3

The SPM3 stage is a 3-axis ultra-high speed nanopositioner, offering a travel range of 75µm along X and Y with resonant frequencies higher than 2kHz on both axis.

The Z portion of the SPM3 stage can have up to 50µm travel range and offers the highest speed capabilities available on the market since it can have up to 12.5kHz resonnant frequency. Indeed, when used with the high power controller, the  step response time of the Z axis of the SPM3.5 can be smaller than a millisecond.

Hence, the SPM stage is designed for demanding metrology applications such as Atomic Force Microscopy.

This piezostage can be proposed with a coarse positioning Microstage (See our Hybrid System).

This nanopositioner is part of our high-speed product line (High power controller available).

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LFHS-2 with Z-STAGE.10

  • Features :

    • Ultra high speed
    • All 3 axis are Direct drive
    • 75 µm XY and up to 50µm Z travel range
    • Closed loop control
    • Silicon sensor technology
    • Picometric noise floor

    Applications :

    • Atomic Force Microscopy
    • Scanning Probe Microscopy
    • High speed and high resolution XYZ positioning
  • 3 axis Controller PRIO3 Axis Controller
    Our 3 axis PiezoStage will be used with a 3 axis controller standard or high speed
    MANUAL-STAGE+SPM-3Hybrid system
    The SPM-3 can be proposed with a coarse positioning stage
    Adaptation plate for 160x110 apertureAdapter Plate
    This adapter plate allows to mount the SPM-3 on a stages with K-type frame (160mm x 110mm aperture)
  • downloadTechnical Drawing
    SPM-3 Piezostage dimensions
    Download
    PDF -
    23,8 Ko

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Specifications :

Unit SPM3.5 SPM3.10 SPM3.25 SPM3.50
Range of motion XY / Z (µm) 75 / 5 75 / 10 75 / 25 75 / 50
Resolution XY / Z (nm) 0,075 / 0,005 0,075 / 0,01  0,075 / 0,025 0,075 / 0,05
Typical noise floor XY / Z (nm) 0,0075 / 0,0005 0,0075 / 0,001 0,0075 / 0,0025 0,0075 / 0,005
Full range repeatability XY / Z (nm) 0,15 / 0,01 0,15 / 0,02 0,15 / 0,05 0,15 / 0,1
Linearization XYZ (typical) 0,02% 0,02% 0,02% 0,02%
Resonant frequency X / Y / Z (Hz) 3000 / 2000 / 12 500 3000 / 2000 / 5 200 3000 / 2000 / 5 500 3000 / 2000 / 3 500
Stiffness X / Y / Z (N/µm) 4 / 3 / 40,1 4 / 3 / 7,5 4 / 3 / 7,7 4 / 3 / 2,7
Maximum load :
 – horizontal use (kg) 0,1 0,1 0,1 0,1
 – vertical use (max torque) (kg) 0,01 0,01 0,01 0,01
Sensor  Silicon HR sensor Silicon HR sensor   Silicon HR sensor  Silicon HR sensor
Size W x L x H (mm) 120,9 x 120,9 x 32,5 120,9 x 120,9 x 32,5 120,9 x 120,9 x 49,3 120,8 x 120,9 x 69,3
Material Al Al Al Al
Cable length (m) 2 2 2 2
Controller   High Speed High Speed High Speed High Speed

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Exemple of use :

LFHS-2 with Z-STAGE.50 on a Manual Stage
SPM3
Hybrid system with SPM3.50 Customized system with SPM3.50

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Demo product on request