LFS3
The LFS3 is a 3-axis nanopositioner, offering 100µm travel along X and Y, 20 µm travel along Z and with a 40 x 40 mm aperture. This piezostage can be combined with a coarse positionning Microstage.
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Specifications :
| Specifications | ||
|---|---|---|
| LFS3 | Unit | |
| Range of motion X Y | 100 | µm |
| Range of motion Z | 20 | µm |
| Resolution X Y | 0,1 | nm |
| Resolution Z | 0,02 | nm |
| Typical noise floor X Y | 0,01 | nm |
| Typical noise floor Z | 0,002 | nm |
| Full range repeatability X Y | 0,2 | nm |
| Full range repeatability Z | 0,04 | nm |
| Linearization X Y Z (typical) | 0,02% | |
| Resonant frequency X / Y / Z | 350 / 250 / 2 700 | Hz |
| Stiffness X / Y / Z | 0,5 / 0,5 / 3 | N/µm |
| Maximum Load* : | ||
| - horizontal use | 1 | kg |
| - vertical use | 0,5 | kg |
| Sensor | Silicon HR sensor | |
| Size W x L x H | 100 x 100 x 50 | mm |
| Material | Al | |
| Cable length** | 2 | m |
| Controller | Standard |
