LFS3

The LFS3 is a 3-axis nanopositioner, offering 100µm travel along X and Y, 20 µm travel along Z and with a 40 x 40 mm aperture. This piezostage can be combined with a coarse positionning Microstage.



  • Features :

    • Square aperture (40 x 40 mm)
    • 100 µm motion on X, Y
    • Fast 20 µm motion on Z
    • Closed loop control
    • Silicon sensor technology
    • Less than 10pm noise floor

    Applications :

    • Super Resolution microscopy
    • Nanolithography
    • Particle tracking
    • Confocal microscopy
    • Atomic Force Microscopy
    • Bruker AFM upgrade
  • 3 axis Controller PRIO3 Axis Controller
    Our 3 axis PiezoStage will be used with a 3 axis controller standard or high speed
  • downloadTechnical Drawing
    LFS3 Piezostage dimensions
    Download
    PDF -
    91 Ko

 Specifications 
LFS3Unit
Range of motion XY / Z100 / 20µm
Resolution XY / Z0.1 / 0.02nm
Typical noise floor XY / Z0.01 / 0.002nm
Full range repeatability XY / Z0.2 / 0.04nm
Linearization X Y Z (typical)0.02%
Resonant frequency X / Y / Z350 / 250 / 2 700Hz
Stiffness X / Y / Z0.5 / 0.5 / 3N/µm
Maximum Load* :
- horizontal use1kg
- vertical use0.5kg
SensorSilicon HR sensor
Size W x L x H100 x 100 x 50mm
MaterialAl
Cable length**2m
ControllerStandard


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Demo product on request