LFS3
The LFS3 is a 3-axis nanopositioner, offering 100µm travel along X and Y, 20 µm travel along Z and with a 40 x 40 mm aperture. This piezostage can be combined with a coarse positionning Microstage.
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| Specifications | ||
|---|---|---|
| LFS3 | Unit | |
| Range of motion XY / Z | 100 / 20 | µm |
| Resolution XY / Z | 0.1 / 0.02 | nm |
| Typical noise floor XY / Z | 0.01 / 0.002 | nm |
| Full range repeatability XY / Z | 0.2 / 0.04 | nm |
| Linearization X Y Z (typical) | 0.02% | |
| Resonant frequency X / Y / Z | 350 / 250 / 2 700 | Hz |
| Stiffness X / Y / Z | 0.5 / 0.5 / 3 | N/µm |
| Maximum Load* : | ||
| - horizontal use | 1 | kg |
| - vertical use | 0.5 | kg |
| Sensor | Silicon HR sensor | |
| Size W x L x H | 100 x 100 x 50 | mm |
| Material | Al | |
| Cable length** | 2 | m |
| Controller | Standard |
