The LFHS3 is a 3-axis ultra-high speed nanopositioner, offering up to 75µm travel along X and Y, up to 50 µm travel along Z, a large 66 x 66 mm aperture and resonant frequencies higher than 1.5kHz on every axis. This piezostage can be combined with a coarse positionning Microstage (See our Hybrid System).

This nanopositioner is part of our high-speed product line (High power controller available). High speed scans and step response time shorter than 2 ms are possible with the High power controller.


  • Features :

    • Ultra high speed
    • Direct drive
    • Square aperture (66 x 66 mm)
    • 75 µm X, Y motion, 50µm Z motion
    • Closed loop control
    • Silicon sensor technology
    • Less than 10pm noise floor

    Applications :

    • Super resolution microscopy
    • Fast XY scanning
    • Particle tracking
    • Confocal microscopy
    • Atomic Force Microscopy
    • Optical tweezer
  • 3 axis Controller PRIO3 Axis Controller
    Our 3 axis PiezoStage will be used with a 3 axis controller standard or high speed
    MANUAL-STAGE+LFHS-3Hybrid system
    The LFHS3 can be proposed with a coarse positioning stage
    SH-BOT-SQUARE-LABTEKSquare Sample Holders
    See the different Square Sample holders available for the LFHS3
    Adaptation plate for 160x110 apertureAdapter Plate
    This adapter plate allows to mount the LFHS3 on a stages with K-type frame (160mm x 110mm aperture)
  • downloadTechnical Drawing
    LFHS3 Piezostage dimensions
    PDF -
    40 Ko
    downloadPiezoConcept Datasheet
    Complet datasheet with variable travel range, specifications, dimensions ...
    PDF -
    143 Ko

 XY Specifications 
Range of motion X Y305075µm
Resolution X Y0.030.050.075nm
Typical noise floor X Y0.0030.0050.0075nm
Full range repeatability X Y0.060.10.15nm
Linearization X Y (typical)0.02%
Resonant frequency X / Y3000 / 2000Hz
Stiffness X / Y4 / 3N/µm

 Z Specifications 
Range of motion Z2550µm
Resolution Z0.0250.05nm
Typical noise floor Z0.00250.005nm
Full range repeatability Z0.050.1nm
Linearization Z (typical)0.02%
Resonant frequency Z1500Hz
Stiffness Z3N/µm

 General Specifications 
Maximum load* :
- horizontal use1kg
- vertical use0.5kg
SensorSilicon HR sensor
Size W x L x H140 x121 x 34mm
Cable length**2m
ControllerHigh Speed

LFHS3.XX.xx :
XX : 30, 50 or 75 according to range of motion of X Y axis
xx : 25 or 50 according to range of motion of Z axis

*Higher load on request
**Higher length on request

EUROPE : 9:00 am - 6:30 pm
USA : 7:00 am - 4:00 pm (CST)

Advices & after-sales service

Demo product on request