LF3

The LF3 is a 3-axis nanopositioner, offering 100, 200 or 300 µm travel along X and Y, 50 µm travel along Z and a large 66 x 66 mm aperture. This piezostage can be combined with a coarse positionning Microstage (See our Hybrid System).

Features & Applications
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Features :
- Square aperture (66 x 66 mm)
- 100, 200 or 300 µm motion
- Closed loop control
- Silicon sensor technology
- Less than 30pm noise floor
Applications :
- Super Resolution microscopy
- Nanolithography
- Particle tracking
- Confocal microscopy
- Atomic Force Microscopy
- Bruker AFM upgrade

	3 Axis Controller Our 3 axis PiezoStage will be used with a 3 axis controller standard or high speed
	Hybrid System The LF3 can be proposed with a coarse positioning stage
	Square Sample Holders See the different Square Sample holders available for the LF3
	Adapter Plate This adapter plate allows to mount the LF3 on a stages with K-type frame (160mm x 110mm aperture)

Technical Drawing
LF3 Piezostage dimensions Download
PDF -
393 Ko

	Specifications

	LF3.100	LF3.200	LF3.300	Unit
Range of motion XY/Z	100/50	200/50	300/50	µm
Resolution XY/Z	0.1/0.05	0.2/0.05	0.3/0.05	nm
Typical noise floor XY/Z	0.01/0.005	0.02/0.005	0.03/0.005	nm
Full range repeatability XY/Z	0.2/0.1	0.4/0.1	0.6/0.1	nm
Linearization	0.02%	0.02%	0.02%	(typical)
Resonant frequency X/Y/Z	500/350/1500	400/300/1500	300/200/1500	Hz
Stiffness X/Y/Z	0.6/0.5/3	0.5/0.4/3	0.4/0.3/3	N/µm
Maximum Load* :
- horizontal use	1			kg
- vertical use	0.5			kg
Sensor	Silicon HR sensor
Size W x L x H	140 x 121 x 35.2			mm
Material	Al
Cable length**	2			m
Controller	Standard

*Higher load on request

**Higher length on request