LF3
The LF3 is a 3-axis nanopositioner, offering 100, 200 or 300 µm travel along X and Y, 50 µm travel along Z and a large 66 x 66 mm aperture. This piezostage can be combined with a coarse positionning Microstage (See our Hybrid System).
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Specifications | ||||
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LF3.100 | LF3.200 | LF3.300 | Unit | |
Range of motion XY/Z | 100/50 | 200/50 | 300/50 | µm |
Resolution XY/Z | 0.1/0.05 | 0.2/0.05 | 0.3/0.05 | nm |
Typical noise floor XY/Z | 0.01/0.005 | 0.02/0.005 | 0.03/0.005 | nm |
Full range repeatability XY/Z | 0.2/0.1 | 0.4/0.1 | 0.6/0.1 | nm |
Linearization | 0.02% | 0.02% | 0.02% | (typical) |
Resonant frequency X/Y/Z | 500/350/1500 | 400/300/1500 | 300/200/1500 | Hz |
Stiffness X/Y/Z | 0.6/0.5/3 | 0.5/0.4/3 | 0.4/0.3/3 | N/µm |
Maximum Load* : | ||||
- horizontal use | 1 | kg | ||
- vertical use | 0.5 | kg | ||
Sensor | Silicon HR sensor | |||
Size W x L x H | 140 x 121 x 35.4 | mm | ||
Material | Al | |||
Cable length** | 2 | m | ||
Controller | Standard |
*Higher load on request
**Higher length on request