The LF3 is a 3-axis nanopositioner, offering 100, 200 or 300 µm travel along X and Y, 50 µm travel along Z and a large 66 x 66 mm aperture. This piezostage can be combined with a coarse positionning Microstage (See our Hybrid System).


  • Features :

    • Square aperture (66 x 66 mm)
    • 100, 200 or 300 µm motion
    • Closed loop control
    • Silicon sensor technology
    • Less than 30pm noise floor

    Applications :

    • Super Resolution microscopy
    • Nanolithography
    • Particle tracking
    • Confocal microscopy
    • Atomic Force Microscopy
    • Bruker AFM upgrade
  • 3 axis Controller PRIO3 Axis Controller
    Our 3 axis PiezoStage will be used with a 3 axis controller standard or high speed
    MANUAL-STAGE+LF-3Hybrid System
    The LF3 can be proposed with a coarse positioning stage
    SH-BOT-SQUARE-LABTEKSquare Sample Holders
    See the different Square Sample holders available for the LF3
    Adaptation plate for 160x110 apertureAdapter Plate
    This adapter plate allows to mount the LF3 on a stages with K-type frame (160mm x 110mm aperture)
  • downloadTechnical Drawing
    LF3 Piezostage dimensions
    PDF -
    47 Ko

Range of motion XY/Z100/50200/50300/50µm
Resolution XY/Z0.1/0.050.2/0.050.3/0.05nm
Typical noise floor XY/Z0.01/0.0050.02/0.0050.03/0.005nm
Full range repeatability XY/Z0.2/0.10.4/0.10.6/0.1nm
Resonant frequency X/Y/Z500/350/1500400/300/1500300/200/1500Hz
Stiffness X/Y/Z0.6/0.5/30.5/0.4/30.4/0.3/3N/µm
Maximum Load* :
- horizontal use1kg
- vertical use0.5kg
SensorSilicon HR sensor
Size W x L x H140 x 121 x 35.4mm
Cable length**2m

*Higher load on request

**Higher length on request

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USA : 7:00 am - 4:00 pm (CST)

Advices & after-sales service

Demo product on request