LF3

The LF3 is a 3-axis nanopositioner, offering 100, 200 or 300 µm travel along X and Y, 50 µm travel along Z and a large 66 x 66 mm aperture. This piezostage can be combined with a coarse positionning Microstage (See our Hybrid System).

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LF-3

  • Features :

    • Square aperture (66 x 66 mm)
    • 100, 200 or 300 µm motion
    • Closed loop control
    • Silicon sensor technology
    • Less than 30pm noise floor

    Applications :

    • Super Resolution microscopy
    • Nanolithography
    • Particle tracking
    • Confocal microscopy
    • Atomic Force Microscopy
    • Bruker AFM upgrade
  • 3 axis Controller PRIO3 Axis Controller
    Our 3 axis PiezoStage will be used with a 3 axis controller standard or high speed
    MANUAL-STAGE+LF-3Hybrid System
    The LF3 can be proposed with a coarse positioning stage
    SH-BOT-SQUARE-LABTEKSquare Sample Holders
    See the different Square Sample holders available for the LF3
    Adaptation plate for 160x110 apertureAdapter Plate
    This adapter plate allows to mount the LF3 on a stages with K-type frame (160mm x 110mm aperture)
  • downloadTechnical Drawing
    LF3 Piezostage dimensions
    Download
    PDF -
    393 Ko

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Specifications :

Unit LF3.100  LF3.200 LF3.300 
Range of motion XY/Z (µm) 100/50 200/50 300/50
Resolution XY/Z (nm) 0.1/0.05 0.2/0.05 0.3/0.05
Typical noise floor XY/Z (nm) 0.01/0.005 0.02/0.005 0.03/0.005
Full range repeatability XY/Z (nm) 0.2/0.1 0.4/0.1 0.6/0.1
Linearization (typical)   0.02% 0.02% 0.02%
Resonant frequency X/Y/Z (Hz) 500/350/1500 400/300/1500 300/200/1500
Stiffness XY/Z (N/µm) 0.6/0.5/3 0.5/0.4/3 0.4/0.3/3
Maximum load*:
 – horizontal use (kg) 1 1 1
 – vertical use (kg) 0.5 0.5 0.5
Sensor Silicon HR sensor Silicon HR sensor Silicon HR sensor
Size W x L x H (mm) 140 x 121 x 35.2 140 x 121 x 35.2 140 x 121 x 35.2
Material Al Al Al
Cable length (m) 2 2 2
Controller   Standard Standard Standard

*Higher load on request


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