The BIO3 is a 3 axis ultra-low profile nanopositioner designed to be integrated in any kind of inverted microscopes. Microscope slides can fit in its rectangular aperture. This piezostage can be combined with a coarse positionning Microstage (See our  Hybrid System)

The standard BIO3 is made of aluminium but for Bruker AFM upgrade, the BIO3.100 (100µm version) is available in Invar, which allows higher thermal stability.


  • Features :

    • Low profile
    • Rectangular aperture (54 x 83,6 mm)
    • 100, 200 or 300 µm motion
    • Closed loop control
    • Silicon sensor technology
    • Less than 30pm noise floor

    Applications :

    • Super Resolution microscopy
    • Nanolithography
    • Particle tracking
    • Confocal microscopy
    • Atomic Force Microscopy
    • Bruker AFM upgrade
  • 3 axis Controller PRIO3 Axis Controller
    Our 3 axis PiezoStage will be used with a 3 axis controller standard or high speed
    MANUAL-STAGE+BIO-3Hybrid system
    The BIO3 can be proposed with a coarse positioning stage
    SH-BOT-REC-SLIDERectangular Sample Holders
    See the different Square Sample holders available for the BIO3
    Adaptation plate for 160x110 apertureAdapter Plate
    This adapter plate allows to mount the BIO3 on a stages with K-type frame (160mm x 110mm aperture)
  • downloadTechnical Drawing
    BIO3 Piezostage dimensions
    PDF -
    47 Ko
    downloadPiezoConcept Datasheet
    Complet datasheet with variable travel range, specifications, dimensions ...
    PDF -
    143 Ko

Range of motion100200300µm
Typical noise floor0.010.020.03nm
Full range repeatability0.20.40.6nm
Resonant frequency X/Y/Z500/400/400400/350/300300/250/250Hz
Stiffness X/Y/Z0.6/0.5/0.50.5/0.4/0.40.4/0.3/0.3N/µm
Maximum Load* :
- horizontal use1kg
- vertical use0.5kg
SensorSilicon HR sensor
Size W x L x H213 x 152.5 x 21mm
MaterialAl or InvarAlAl
Cable length**2m

*Higher load on request

**Higher length on request

EUROPE : 9:00 am - 6:30 pm
USA : 7:00 am - 4:00 pm (CST)

Advices & after-sales service

Demo product on request