The Z-STAGE is a compact Z direct-drive nanopositioner which has high speed capabilities. It can be combined with a 2 axis nanopositioner with a 66×66 mm aperture (LF2/LFHS2) in order to get a SPM3 or a SPM3LR. The Z stage is available with either 5, 10, 30 or 50µm range of motion.

This nanopositioner is part of our high-speed product line (High power controller available).

Z-1 All

  • Features :

    • High speed, direct drive
    • 5, 10, 30 or 50 µm travel range
    • Closed loop control
    • Silicon sensor technology
    • Less than 10pm noise floor

    Applications :

    • AFM Z scanner
    • Casimir Force study
    • Fast Z scanning
    • Nanoindentation
  • 1 axis Contoller mini1 Axis Controller
    The Z-STAGE will be used with a 1 axis controller but it can be used with a 2 axis or 3 axis controller if it's combined with LT-2, LF-2 or an other piezostage
  • downloadTechnical Drawing
    Z-STAGE variable dimensions according to the travel range
    PDF -
    75 Ko

Range of motion5103050(µm)
Typical noise floor0.00050.0010.0030.005(nm)
Full range repeatability0.
Linearization (typical)0.02%
Resonant frequency12500550055003500(Hz)
Size W x L x HØ30 x 28.5Ø30 x 28.5Ø30 x 48.5Ø30 x 66.5(mm)
Maximum load * :
- horizontal use0.1(kg)
- vertical use (torque)0.01(N.m)
SensorSilicon HR sensor
Cable length**2(m)
ControllerStandard or High Speed

*Higher load on request

** Higher length on request

Exemple of use:

 Z-1.5 on TL-2.100' Z.50 on HS-2.50
Z-STAGE.5 embedded in a LF2.100 (SPM3LR.100.05) Z-STAGE.50 on 2 stacked HS1.50 Aperture

LFHS-2 with Z-STAGE.50 on a Manual Stage

LFHS2 with Z-STAGE.50 on a manual Microstage (See the SPM3)

EUROPE : 9:00 am - 6:30 pm
USA : 7:00 am - 4:00 pm (CST)

Advices & after-sales service

Demo product on request