Z-stage

 The Z-stage is a compact Z direct-drive nanopositioner which has high speed capabilities. It can be combined with a 2 axis nanopositioner which has a 66×66 mm aperture (LT2/LFHS2) or with an assembly of 2 compact HS1 Aperture.

The Z stage can be offered with either 5, 10, 25 or 50µm range of motion.

This nanopositioner is part of our high-speed product line (High power controller available).

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Z-1 All

  • Features :

    • High speed, direct drive
    • 5, 10, 25 or 50 µm travel range
    • Closed loop control
    • Silicon sensor technology
    • Less than 10pm noise floor

    Applications :

    • AFM Z scanner
    • Casimir Force study
    • Fast Z scanning
    • Nanoindentation
  • 1 axis Contoller mini1 Axis Controller
    The Z-STAGE will be used with a 1 axis controller but it can be used with a 2 axis or 3 axis controller if it's combined with LT-2, LF-2 or an other piezostage
  • downloadTechnical Drawing
    Z-STAGE variable dimensions according to the travel range
    Download
    PDF -
    23,8 Ko

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Specifications :

Unit Z.5 Z.10 Z.25 Z.50
Range of motion (µm) 5 10 25 50
Resolution (nm) 0,005 0,01 0,025 0,05
Typical noise floor (nm) 0,0005 0,001 0,0025 0,005
Full range repeatability (nm) 0,01 0,02 0,05 0,1
Linearization (typical)   0,02% 0,02% 0,02% 0,02%
Resonant frequency (Hz) 12 500 5 200 5 500 3 500
Stiffness (N/µm) 40,1 7,5 7,7 2,7
Maximum load* :
– horizontal use (kg) 0,1 0,1 0,1 0,1
– vertical use (max torque) (N.m) 0,01 0,01 0,01 0,01
Sensor Silicon HR sensor Silicon HR sensor Silicon HR sensor Silicon HR sensor
Size Ø x H (mm) Ø30 x 29,8 Ø30 x 29,8 Ø30 x 49,8 Ø30 x 69,8
Material Al Al Al Al
Cable length (m) 2 2 2 2
Controller   Standard or High Speed Standard or High Speed Standard or High Speed Standard or High Speed

*Higher load on request

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Exemple of use :

 Z-1.5 on TL-2.100' Z.50 on HS-2.50
Z.5 on the LT-2.100 Z.50 on 2 stacked HS-1.50 Aperture

LFHS-2 with Z-STAGE.50 on a Manual Stage

LFHS-2 with Z-STAGE.50 on a Manual Stage


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Advices & after-sales service

Demo product on request