SLR

 The maximum travel range of the SLR piezostages family starts at 300µm and ends at 1500µm.

In comparison to other systems on the market, the 800µm and 1500µm is exceptionally reliable due to the « FuseProtect » technology. The fuse technology is an effective way to ensure high reliability for critical applications. Thanks to the technology of damage tolerant actuator piezo stacks, the application keeps working even if a section of the actuator is damaged. The fuse technology fuses out any damaged ceramic element and the remaining ceramic elements continue to operate. As a consequence, the SLR300 and SLR1500 is offered with 5 years warranty standard.

The  SLR piezostages is certainly one of the best choice in terms of price/travel range ratio.

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ULT.15003

  • Features :

    • 300, 1500 µm motion
    • Closed loop control
    • Silicon sensor technology
    • Less than 150pm noise floor
    • Exceptionally reliable due to a frictionless assembly

    Applications :

    • Research and Industry
    • Nanolithography
    • Adaptative optics
  • 1 axis Contoller mini1 Axis Controller
    The SLR stages will be used with a 1 axis controller but it may be used with a 2 or 3 axis controller for multi axis configuration
  • downloadTechnical Drawing
    SLR.300 Piezostage dimensions...
    Download
    PDF -
    43 Ko
    downloadPiezoConcept Datasheet
    Complet datasheet with variable travel range, specifications, dimensions ...
    Download
    PDF -
    599 Ko

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Specifications :

Unit SLR.300  SLR.500  SLR.800  SLR.1500   
Range of motion (µm)  300 500 800  1500
Resolution (nm)  0,3 0,5  0,8 1,5
Typical noise floor (nm)  0,03 0,05  0,08 0,15
Full range repeatability (nm)  0,6 1  1,6 3
Linearization (typical)    0,02% 0,02%  0,02% 0,02%
Resonant frequency (Hz)  745 330  220 135
Stiffness (N/µm) 0,35 0,16 0,16 0,15
Maximum load* :
 – horizontal use (kg)  1  1
 – vertical use (kg)  0,5 0,5  0,5 0,5
Sensor  Silicon HR sensor Silicon HR sensor  Silicon HR sensor Silicon HR sensor  
Size W x L x H (mm)  50x50x15 60 x 60 x 15  80x80x17 100x100x20,6
Material  Al Al  Al Al
Cable length (m)  2  2
Controller   Standard Standard Standard Standard

*Higher load on request


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