SLR

 The SLR.1500 is the longest travel range (1500 microns) piezostage that we offer in our product line.

In comparison to other systems on the market, this stage is exceptionally reliable due to a totally frictionless assembly.

It can be combined to form 2 or even 3-axis nanopositioning systems.

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ULT.15003

  • Features :

    • 300, 1500 µm motion
    • Closed loop control
    • Silicon sensor technology
    • Less than 150pm noise floor
    • Exceptionally reliable due to a frictionless assembly

    Applications :

    • Research and Industry
    • Nanolithography
    • Adaptative optics
  • 1 axis Contoller mini1 Axis Controller
    The SLR stages will be used with a 1 axis controller but it may be used with a 2 or 3 axis controller for multi axis configuration
  • downloadTechnical Drawing
    SLR.300 Piezostage dimensions...
    Download
    PDF -
    43 Ko
    downloadPiezoConcept Datasheet
    Complet datasheet with variable travel range, specifications, dimensions ...
    Download
    PDF -
    599 Ko

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Specifications :

Unit SLR.300  SLR.1500   
Range of motion (µm)  300 1500  
Resolution (nm)  0,3 1,5
Typical noise floor (nm)  0,03 0,15
Full range repeatability (nm)  0,6 3
Linearization (typical)    0,02% 0,02%
Resonant frequency (Hz)  745 135
Stiffness (N/µm) 0,35 0,15
Maximum load* :
 – horizontal use (kg)  1
 – vertical use (kg)  0,5 0,5
Sensor  Silicon HR sensor Silicon HR sensor  
Size W x L x H (mm)  50x50x15 100 x 100 x 20,6
Material  Al Al
Cable length (m)  2
Controller   Standard Standard

*Higher load on request


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