SLR1500

 The SLR1500 is the longest travel range (1500 microns) piezostage that we offer in our product line.

In comparison to other systems on the market, this stage is exceptionally reliable due to a totally frictionless assembly.

It can be combined to form 2 or even 3-axis nanopositioning systems.

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ULT.15003

  • Features :

    • 1500 µm motion
    • Closed loop control
    • Silicon sensor technology
    • Less than 150pm noise floor
    • Exceptionally reliable due to a frictionless assembly

    Applications :

    • Research and Industry
    • Nanolithography
    • Adaptative optics
  • 1 axis Contoller mini1 Axis Controller
    The SLR.1500 will be used with a 1 axis controller but it may be used with a 2 or 3 axis controller for multi axis configuration
  • downloadTechnical Drawing
    SLR.1500 Piezostage dimensions...
    Download
    PDF -
    23,8 Ko

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Specifications :

Unit SLR.1500   
Range of motion (µm) 1500  
Resolution (nm) 1,5
Typical noise floor (nm) 0,15
Full range repeatability (nm) 0,3
Linearization (typical)   0,02%
Resonant frequency (Hz) 135
Stiffness (N/µm) 0,15
Maximum load :
 – horizontal use (kg)
 – vertical use (kg) 0,5
Sensor Silicon HR sensor  
Size W x L x H (mm) 100 x 100 x 20,6
Material Al
Cable length (m)
Controller   Standard

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Advices & after-sales service

Demo product on request