The FOCHS.100 is a tubular design piezotage dedicated to microscope objective high speed nanopositioning. It is offered with 100 microns of travel. The FOCHS.100 is used in a wide range of applications : Z-stack, laser machining, autofocusing. It can work also together with automated focus stabilisation devices (that we can provide). It is made from aluminium, steel and brass. It is equipped with sensor offering stability in the picometer level.

The brass mounting ring can be easily exchanged so that almost any objectives can be used with the FOCHS.100 nanopositioner. The threads which are available are : RMS, M25, M26, M27 and M32.


  • Features :

    • 100 µm travel range
    • High Speed
    • Moves objectives with sub-nm resolution
    • Parallel flexure guiding
    • Closed loop control
    • Silicon sensor technology
    • Less than 10pm noise floor

    Applications :

    • Interferometry
    • Autofocus system
    • 3D imaging
    • Confocal microscopy
    • Super resolution microscopy
    • Semiconductor metrology
  • 1 axis Contoller mini1 Axis Controller
    The FOCHS will be used with a 1 axis controller
    extension ringExtension Ring
    12 mm extension ring for extend your microscope objectifs without FOC piezostage.
    Size available : RMS / M25 / M26 / M27 / M32
  • downloadTechnical Drawing
    FOCHS.100 Piezostage dimensions, ring size available ...
    PDF -
    37 Ko
    downloadPiezoConcept Datasheet
    Complet datasheet with variable travel range, specifications, dimensions ...
    PDF -
    1 565Ko

Specifications :

Unit FOCHS.100
Range of motion (µm) 100
Resolution (nm) 0,1
Typical noise floor (nm) 0,01
Full range repeatability (nm) 0,2
Linearization (typical)   0,02%
Resonant frequency (Hz) 1 175
Stiffness (N/µm) 3,5
Maximum load* :
 – horizontal use (kg) 0,5
 – vertical use (kg) 0,5
Sensor Silicon HR sensor
Size Diameter x H (mm) Ø 65,5 x 50,3
Material Al
Cable length (m) 2
Controller   High Speed












*Higher load on request

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Demo product on request