The FOCHS.100 is a tubular design piezo stage dedicated to accurate positioning of microscope objective. It is designed to travel 100 microns. The FOCHS.100 is used in a wide range of applications: Z-stack, laser machining, autofocusing. It can also work together with an automated focus stabilisation device, which we can provide. It is made from aluminium, steel and brass. It is equipped with sensors offering stability in the picometer level.

The brass mounting ring can easily be changed so that almost every objective would fit in the FOCHS.100 nanopositioner. Threads  available are the RMS, M25, M26, M27 and M32.


  • Features :

    • 100 µm travel range
    • High Speed
    • Moves objectives with sub-nm resolution
    • Parallel flexure guiding
    • Closed loop control
    • Silicon sensor technology
    • Less than 10pm noise floor

    Applications :

    • Interferometry
    • Autofocus system
    • 3D imaging
    • Confocal microscopy
    • Super resolution microscopy
    • Semiconductor metrology
  • 1 axis Contoller mini1 Axis Controller
    The FOCHS will be used with a 1 axis controller
    extension ringExtension Ring
    12 mm extension ring for extend your microscope objectifs without FOC piezostage.
    Size available : RMS / M25 / M26 / M27 / M32
  • downloadTechnical Drawing
    FOCHS.100 Piezostage dimensions, ring size available ...
    PDF -
    37 Ko
    downloadPiezoConcept Datasheet
    Complet datasheet with variable travel range, specifications, dimensions ...
    PDF -
    1 565Ko


Unit FOCHS.100
Range of motion (µm) 100
Resolution (nm) 0.1
Typical noise floor (nm) 0.01
Full range repeatability (nm) 0.2
Linearization (typical)   0.02%
Resonant frequency (Hz) 1 175
Stiffness (N/µm) 3.5
Maximum load*:
 – horizontal use (kg) 0.5
 – vertical use (kg) 0.5
Sensor Silicon HR sensor
Size Diameter x H (mm) Ø 65.5 x 50.3
Material Al
Cable length (m) 2
Controller   High Speed












*Higher load on request

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