The FOC.500 is a nanopositioner dedicated to accurate positioning of microscope objective with 500 microns of travel. The FOC.500 is used in a wide range of applications: Z-stack, 3D imaging, autofocus or together with automated focus stabilisation devices, which we can also provide. It is made from aluminium, steel and brass, and is equipped with sensors offering stability in the picometer level.

The brass mounting ring can easily be changed so that every objective would fit in the FOC.500 nanopositioner. Threads available are the RMS, M25, M26, M27 and M32.

It also available in 100, 200, 300 µm travel range (see FOC).

  • Features :

    • 500 µm travel range
    • Moves objectives with sub-nm resolution
    • Parallel flexure guiding
    • Closed loop control
    • Silicon sensor technology
    • Less than 50pm noise floor

    Applications :

    • Interferometry
    • Autofocus system
    • 3D imaging
    • Confocal microscopy
    • Super resolution microscopy
    • Semiconductor metrology
  • 1 axis Contoller mini1 Axis Controller
    The FOC.500 will be used with a 1 axis controller
    extension ringExtension Ring
    12 mm extension ring for extend your microscope objectifs without FOC.500 piezostage.
    Size available : RMS / M25 / M26 / M27 / M32
  • downloadTechnical Drawing FOC.500
    FOC.500 Piezostage dimensions, ring size available ...
    PDF -
    332 Ko

Range of motion Z500µm
Resolution Z0.5nm
Typical noise floor Z0.05nm
Full range repeatability Z1nm
Linearization Z 0.02%(typical)
Resonant frequency Z200Hz
Stiffness Z0.25N/µm
Maximum Load* :
- horizontal use1kg
- vertical use0.5kg
SensorSilicon HR sensor
Size W x L x H59 x 63.3 x 41mm
MaterialAl / SS / Brass
Cable length**2m

*Higher load on request

**Higher length on request

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Advices & after-sales service

Demo product on request