The FOC is a nanopositioner dedicated to accurate positioning of microscope objective. It is available with 100, 200, 300 microns of travel. The FOC is used in a wide range of applications: Z-stack, 3D imaging, autofocus or together with automated focus stabilisation devices, which we can also provide. It is made from aluminium, steel and brass, and is equipped with sensors offering stability in the picometer level.

The brass mounting ring can easily be changed so that every objective would fit in the FOC nanopositioner. Threads available are the RMS, M25, M26, M27 and M32.

It also available in 500 µm travel range (see FOC.500).

  • Features :

    • 100, 200, 300 µm travel range
    • Moves objectives with sub-nm resolution
    • Parallel flexure guiding
    • Closed loop control
    • Silicon sensor technology
    • Less than 30pm noise floor

    Applications :

    • Interferometry
    • Autofocus system
    • 3D imaging
    • Confocal microscopy
    • Super resolution microscopy
    • Semiconductor metrology
  • 1 axis Contoller mini1 Axis Controller
    The FOC will be used with a 1 axis controller
    extension ringExtension Ring
    12 mm extension ring for extend your microscope objectifs without FOC piezostage.
    Size available : RMS / M25 / M26 / M27 / M32
  • downloadTechnical Drawing FOC
    FOC Piezostage dimensions, ring size available ...
    PDF -
    51 Ko
    downloadPiezoConcept Datasheet
    Complet datasheet with variable travel range, specifications, dimensions ...
    PDF -
    143 Ko

Range of motion Z100200300µm
Resolution Z0.10.20.3nm
Typical noise floor Z0.010.020.03nm
Full range repeatability Z0.20.40.6nm
Linearization Z 0.02%0.02%0.02%(typical)
Resonant frequency Z500350250Hz
Stiffness Z0.60.50.4N/µm
Maximum Load* :
- horizontal use1kg
- vertical use0.5kg
SensorSilicon HR sensor
Size W x L x H53.5 x 66.2 x 34.5mm
MaterialAl / SS / Brass
Cable length**2m

*Higher load on request

**Higher length on request

EUROPE : 9:00 am - 6:30 pm
USA : 7:00 am - 4:00 pm (CST)

Advices & after-sales service

Demo product on request