HS1H

The HS1H is a compact nanopositioner which can be combined to form 2 or even 3-axis nanopositioning systems. It is offered with 30, 50, 70 or 100µm range of motion and has a central aperture of 33 mm, making it ideal for optical microscopy applications. It has a particularly fast step response time due to the direct drive construction.

This nanopositioner is part of our high-speed product line (High power controller available).

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Features & Applications
Related Product
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Features :
- High speed, direct drive
- Stackable for XY or XYZ motion
- Diameter of the aperture : 33mm
- 30,50 or 70 µm motion
- Closed loop control
- Silicon sensor technology
- Less than 10pm noise floor
Applications :
- Interferometry
- Nanolithography
- 3D polymerisation
- High speed focusing
- Adaptative optics
1, 2 or 3 Axis Controller
The HS1H will be used with a 1 axis controller but it may be used with a 2 or 3 axis controller for multi axis configuration

	Technical Drawing HS1H Piezostage variable dimensions according to the travel range	Download PDF - 23,8 Ko
	PiezoConcept Datasheet Complet datasheet with variable travel range, specifications, dimensions ...	Download PDF - 143 Ko

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Specifications :

	Unit	HS1H.30	HS1H.50	HS1H.70	HS1H.100
Range of motion	(µm)	30	50	70	70
Resolution	(nm)	0,03	0,05	0,07	0,07
Typical noise floor	(nm)	0,003	0,005	0,007	0,007
Full range repeatability	(nm)	0,06	0,1	0,14	0,14
Linearization (typical)		0,02%	0,02%	0,02%	0,02%
Resonant frequency	(Hz)	4000	4000	4000	1500
Stiffness	(N/µm)	3	3	3	3
Maximum load* :
– horizontal use	(kg)	1	1	1	1
– vertical use	(kg)	0,5	0,5	0,5	0,5
Sensor		Silicon HR sensor	Silicon HR sensor	Silicon HR sensor	Silicon HR sensor
Size W x L x H	(mm)	62,5 x 96,1 x 12,6	62,5 x 116,1 x 12,6	62,5 x 138,1 x 12,6	62,5 x 138,1 x 12,6
Material		Al	Al	Al	Al
Cable length	(m)	2	2	2	2
Controller		Standard or High Speed	Standard or High Speed	Standard or High Speed	Standard or High Speed

*Higher load on request