HS1H

The HS1H is a compact nanopositioner which can be combined to form 2 or even 3-axis nanopositioning systems. It is offered with 30, 50, 70 or 100µm range of motion and has a central aperture of 33 mm, making it ideal for optical microscopy applications. It has a particularly fast step response time due to the direct drive construction.

This nanopositioner is part of our high-speed product line (High power controller available).

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  • Features :

    • High speed, direct drive
    • Stackable for XY or XYZ motion
    • Diameter of the aperture : 33mm
    • 30,50 or 70 µm motion
    • Closed loop control
    • Silicon sensor technology
    • Less than 10pm noise floor

    Applications :

    • Interferometry
    • Nanolithography
    • 3D polymerisation
    • High speed focusing
    • Adaptative optics
  • 1 axis Contoller mini1, 2 or 3 Axis Controller
    The HS1H will be used with a 1 axis controller but it may be used with a 2 or 3 axis controller for multi axis configuration
  • downloadTechnical Drawing
    HS1H Piezostage variable dimensions according to the travel range
    Download
    PDF -
    23,8 Ko
    downloadPiezoConcept Datasheet
    Complet datasheet with variable travel range, specifications, dimensions ...
    Download
    PDF -
    143 Ko

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Specifications :

Unit HS1H.30 HS1H.50 HS1H.70 HS1H.100
Range of motion (µm) 30 50 70 70
Resolution (nm) 0,03 0,05 0,07 0,07
Typical noise floor (nm) 0,003 0,005 0,007 0,007
Full range repeatability (nm) 0,06 0,1 0,14 0,14
Linearization (typical)   0,02% 0,02% 0,02% 0,02%
Resonant frequency (Hz) 4000 4000 4000 1500
Stiffness (N/µm) 3 3 3 3
Maximum load* :
 – horizontal use (kg) 1 1 1 1
 – vertical use (kg) 0,5 0,5 0,5 0,5
Sensor Silicon HR sensor Silicon HR sensor Silicon HR sensor Silicon HR sensor
Size W x L x H (mm) 62,5 x 96,1 x 12,6 62,5 x 116,1 x 12,6 62,5 x 138,1 x 12,6 62,5 x 138,1 x 12,6
Material Al Al Al Al
Cable length (m) 2 2 2 2
Controller   Standard or High Speed Standard or High Speed Standard or High Speed Standard or High Speed

*Higher load on request


EUROPE : 9:00 am - 6:30 pm
USA : 7:00 am - 4:00 pm (CST)

Advices & after-sales service

Demo product on request