HS1H

The HS1H is a compact nanopositioner which can be combined to form 2 or even 3-axis nanopositioning systems. It is available with 10, 30, 50, 70 or 100µm range of motion and has a central aperture of 33 mm, making it ideal for optical microscopy applications. It has a particularly fast step response time due to the direct drive construction.

This nanopositioner is part of our high-speed product line (High power controller available).

Features & Applications
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Features :
- High speed, direct drive
- Compact design
- Stackable for XY or XYZ motion
- Circular aperture : ø 33mm
- 10, 30, 50, 70 or 100 µm motion
- Closed loop control
- Silicon sensor technology
- Less than 10pm noise floor
Applications :
- Interferometry
- Nanolithography
- 3D polymerisation
- High speed focusing
- Adaptative optics
1, 2 or 3 Axis Controller
The HS1H will be used with a 1 axis controller but it may be used with a 2 or 3 axis controller for multi axis configuration

	Technical Drawing HS1H Piezostage variable dimensions according to the travel range	Download PDF - 38 Ko
	PiezoConcept Datasheet Complet datasheet with variable travel range, specifications, dimensions ...	Download PDF - 143 Ko

	Specifications

	HS1H.10	HS1H.30	HS1H.50	HS1H.70	HS1H.100	Unit
Range of motion	10	30	50	70	100	(µm)
Resolution	0.01	0.03	0.05	0.07	0.1	(nm)
Typical noise floor	0.001	0.003	0.005	0.007	0.01	(nm)
Full range repeatability	0.02	0.06	0.1	0.14	0.2	(nm)
Linearization (typical)	0.02%
Resonant frequency	7000	4000			1500	(Hz)
Stiffness	5.2	3			1.1	(N/µm)
Maximum load * :
- horizontal use	1					(kg)
- vertical use	0.5					(kg)
Sensor	Silicon HR sensor
Size W x L x H	62.5 x 94.6 x 12,6		62.5 x 120.6 x 12.6	62.5 x 138.6 x 12.6		(mm)
Material	Al
Cable length**	2					(m)
Controller	Standard or High Speed

*Higher load on request

**Higher lenght on request